Yoshikazu Miyajima

Person

Utsunomiya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 10,558,117
- Issue date Feb 11, 2020
- Canon Kabushiki Kaisha
- Van Nguyen Truskett
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Application device, imprinting apparatus, and method for manufactur...
- Patent number 10,406,731
- Issue date Sep 10, 2019
- Canon Kabushiki Kaisha
- Tsuyoshi Arai
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 10,406,743
- Issue date Sep 10, 2019
- Canon Kabushiki Kaisha
- Hiromitsu Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mold, imprint apparatus, and method of manufacturing article
- Patent number 10,409,156
- Issue date Sep 10, 2019
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 10,335,984
- Issue date Jul 2, 2019
- Canon Kabushiki Kaisha
- Byung-jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 10,197,910
- Issue date Feb 5, 2019
- Canon Kabushiki Kaisha
- Hiromitsu Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, and method of manufacturing article
- Patent number 10,199,244
- Issue date Feb 5, 2019
- Canon Kabushiki Kaisha
- Nobuto Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint method, imprint apparatus, and production method for article
- Patent number 10,112,324
- Issue date Oct 30, 2018
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Application device, imprinting apparatus, and method for manufactur...
- Patent number 10,022,900
- Issue date Jul 17, 2018
- Canon Kabushiki Kaisha
- Tsuyoshi Arai
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint method, imprint apparatus, and method for manufacturing device
- Patent number 9,952,504
- Issue date Apr 24, 2018
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithography apparatus, lithography method, program, lithography sys...
- Patent number 9,927,725
- Issue date Mar 27, 2018
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and article manufacturing method
- Patent number 9,915,881
- Issue date Mar 13, 2018
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motor apparatus, manufacturing method, exposure apparatus, and devi...
- Patent number 8,159,093
- Issue date Apr 17, 2012
- Canon Kabushiki Kaisha
- Satoshi Iwatani
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holding technique
- Patent number 7,999,919
- Issue date Aug 16, 2011
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-holding technique
- Patent number 7,602,476
- Issue date Oct 13, 2009
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,463,335
- Issue date Dec 9, 2008
- Canon Kabuhsiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 7,426,013
- Issue date Sep 16, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,423,724
- Issue date Sep 9, 2008
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane motor device with surrounding member surrounding coil unit an...
- Patent number 7,408,276
- Issue date Aug 5, 2008
- Canon Kabushiki Kaisha
- Hitoshi Sato
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus, exposure system using the same, and device manufac...
- Patent number 7,391,495
- Issue date Jun 24, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-holding technique
- Patent number 7,379,162
- Issue date May 27, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflection mirror apparatus, exposure apparatus and device manufact...
- Patent number 7,349,063
- Issue date Mar 25, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Exposure method and apparatus having a projection optical system in...
- Patent number 7,345,737
- Issue date Mar 18, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,321,418
- Issue date Jan 22, 2008
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, exposure apparatus using the unit, and device manufac...
- Patent number 7,319,510
- Issue date Jan 15, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,315,347
- Issue date Jan 1, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,312,848
- Issue date Dec 25, 2007
- Canon Kabushiki Kaisha
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,307,698
- Issue date Dec 11, 2007
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and exposure apparatus
- Patent number 7,301,602
- Issue date Nov 27, 2007
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,289,194
- Issue date Oct 30, 2007
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPLICATION DEVICE, IMPRINTING APPARATUS, AND METHOD FOR MANUFACTUR...
- Publication number 20180297247
- Publication date Oct 18, 2018
- Canon Kabushiki Kaisha
- Tsuyoshi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE
- Publication number 20170057154
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20170047234
- Publication date Feb 16, 2017
- Canon Kabushiki Kaisha
- Nobuto Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20170028598
- Publication date Feb 2, 2017
- Canon Kabushiki Kaisha
- Byung-jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20170015045
- Publication date Jan 19, 2017
- Canon Kabushiki Kaisha
- Hiromitsu YAMAGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160339626
- Publication date Nov 24, 2016
- Canon Kabushiki Kaisha
- Van Nguyen Truskett
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160236400
- Publication date Aug 18, 2016
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, PROGRAM, LITHOGRAPHY SYS...
- Publication number 20160238946
- Publication date Aug 18, 2016
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160001493
- Publication date Jan 7, 2016
- Canon Kabushiki Kaisha
- Yutaka Mita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150352756
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Hiromitsu Yamaguchi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20150355558
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPLICATION DEVICE, IMPRINTING APPARATUS, AND METHOD FOR MANUFACTUR...
- Publication number 20150343680
- Publication date Dec 3, 2015
- Canon Kabushiki Kaisha
- Tsuyoshi Arai
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20150328827
- Publication date Nov 19, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND PRODUCTION METHOD FOR ARTICLE
- Publication number 20150165650
- Publication date Jun 18, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD
- Publication number 20150004275
- Publication date Jan 1, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
- Publication number 20150001746
- Publication date Jan 1, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOTOR APPARATUS, MANUFACTURING METHOD, EXPOSURE APPARATUS, AND DEVI...
- Publication number 20090315413
- Publication date Dec 24, 2009
- Canon Kabushiki Kaisha
- Satoshi Iwatani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-HOLDING TECHNIQUE
- Publication number 20080018036
- Publication date Jan 24, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070285648
- Publication date Dec 13, 2007
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING TECHNIQUE
- Publication number 20070139851
- Publication date Jun 21, 2007
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabrication method
- Publication number 20060262413
- Publication date Nov 23, 2006
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060215137
- Publication date Sep 28, 2006
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning apparatus, exposure apparatus, and device manufacturing...
- Publication number 20060209287
- Publication date Sep 21, 2006
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabrication method
- Publication number 20060192934
- Publication date Aug 31, 2006
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device, exposure apparatus using the unit, and device manufac...
- Publication number 20060113040
- Publication date Jun 1, 2006
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20060114433
- Publication date Jun 1, 2006
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and device manufacturing method
- Publication number 20060082754
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050275821
- Publication date Dec 15, 2005
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning apparatus, exposure apparatus, and device manufacturing...
- Publication number 20050255624
- Publication date Nov 17, 2005
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device, exposure apparatus, and device manufacturing method
- Publication number 20050254036
- Publication date Nov 17, 2005
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoshikazu Miyajima

Person

Patents Grantslast 30 patents

Imprint apparatus and article manufacturing method

Application device, imprinting apparatus, and method for manufactur...

Imprint apparatus, imprint method, and method of manufacturing article

Mold, imprint apparatus, and method of manufacturing article

Imprint apparatus and article manufacturing method

Imprint apparatus, imprint method, and method of manufacturing article

Imprint apparatus, and method of manufacturing article

Imprint method, imprint apparatus, and production method for article

Application device, imprinting apparatus, and method for manufactur...

Imprint method, imprint apparatus, and method for manufacturing device

Lithography apparatus, lithography method, program, lithography sys...

Lithography apparatus and article manufacturing method

Motor apparatus, manufacturing method, exposure apparatus, and devi...

Substrate holding technique

Substrate-holding technique

Exposure apparatus, and device manufacturing method

Exposure apparatus and device fabrication method

Exposure apparatus and device manufacturing method

Plane motor device with surrounding member surrounding coil unit an...

Stage apparatus, exposure system using the same, and device manufac...

Substrate-holding technique

Reflection mirror apparatus, exposure apparatus and device manufact...

Exposure method and apparatus having a projection optical system in...

Stage apparatus, exposure apparatus, and device manufacturing method

Stage device, exposure apparatus using the unit, and device manufac...

Exposure apparatus and device manufacturing method

Positioning apparatus, exposure apparatus, and device manufacturing...

Exposure apparatus and device manufacturing method

Stage apparatus and exposure apparatus

Positioning apparatus, exposure apparatus, and device manufacturing...

Patents Applicationslast 30 patents

APPLICATION DEVICE, IMPRINTING APPARATUS, AND METHOD FOR MANUFACTUR...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE

IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, PROGRAM, LITHOGRAPHY SYS...

IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD

APPLICATION DEVICE, IMPRINTING APPARATUS, AND METHOD FOR MANUFACTUR...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT APPARATUS, AND PRODUCTION METHOD FOR ARTICLE

MOLD

IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD FOR MANUFACTURING DEVICE

MOTOR APPARATUS, MANUFACTURING METHOD, EXPOSURE APPARATUS, AND DEVI...

SUBSTRATE-HOLDING TECHNIQUE

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

SUBSTRATE HOLDING TECHNIQUE

Exposure apparatus and device fabrication method

Exposure apparatus and device manufacturing method

Positioning apparatus, exposure apparatus, and device manufacturing...

Exposure apparatus and device fabrication method

Stage device, exposure apparatus using the unit, and device manufac...

Exposure apparatus, and device manufacturing method

Stage apparatus, exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method

Positioning apparatus, exposure apparatus, and device manufacturing...

Stage device, exposure apparatus, and device manufacturing method