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Yoshikazu Nozaki
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Palo Alto, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Wafer stage with a magnet
Patent number
7,164,571
Issue date
Jan 16, 2007
Anelva Corporation
Sunil Wickramanayaka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Device for fixing a gas showerhead or target plate to an electrode...
Patent number
7,159,537
Issue date
Jan 9, 2007
Anelva Corporation
Sunil Wickramanayaka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Wafer Stage
Publication number
20050185359
Publication date
Aug 25, 2005
ANELVA CORPORATION
Sunil Wickramanayaka
H01 - BASIC ELECTRIC ELEMENTS