Yoshikazu SAIGOU

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Operating method of vacuum processing apparatus
- Patent number 11,164,766
- Issue date Nov 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Yoshikazu Saigou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
- Publication number 20210151336
- Publication date May 20, 2021
- Hitachi High-Technologies Corporation
- Yoshikazu SAIGOU
- H01 - BASIC ELECTRIC ELEMENTS