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Yoshikazu Sakano
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Chita, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming a trench with a rounded bottom in a semiconductor...
Patent number
6,521,538
Issue date
Feb 18, 2003
Denso Corporation
Hajime Soga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method for semiconductor substrate
Patent number
6,090,718
Issue date
Jul 18, 2000
Denso Corporation
Hajime Soga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching process for semiconductor
Patent number
5,871,659
Issue date
Feb 16, 1999
Nippondenso Co., Ltd.
Yoshikazu Sakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching process for semiconductor
Patent number
5,522,966
Issue date
Jun 4, 1996
Nippondenso Co., Ltd.
Atsushi Komura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching process for semiconductor
Patent number
5,423,941
Issue date
Jun 13, 1995
Nippondenso Co., Ltd.
Atsushi Komura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for manufacturing semiconductor device and insulated gate ty...
Publication number
20010023960
Publication date
Sep 27, 2001
Hajime Soga
H01 - BASIC ELECTRIC ELEMENTS