Yoshikazu Sugiyasu

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Capacitive coupling plasma processing apparatus
- Patent number 7,767,055
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Capacitive coupling plasma processing apparatus
- Publication number 20060118044
- Publication date Jun 8, 2006
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS