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Excitation atomic beam source
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Patent number 5,506,405
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Issue date Apr 9, 1996
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Microwave plasma source
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Patent number 5,480,533
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Issue date Jan 2, 1996
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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H01 - BASIC ELECTRIC ELEMENTS
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Laser sputtering apparatus
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Patent number 5,468,930
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Issue date Nov 21, 1995
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Matsushita Electric Industrial Co., Ltd.
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Yukio Nishikawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Laser ablation apparatus
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Patent number 5,446,755
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Issue date Aug 29, 1995
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Microwave plasma source
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Patent number 5,234,565
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Issue date Aug 10, 1993
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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H01 - BASIC ELECTRIC ELEMENTS
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Microwave plasma source
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Patent number 5,230,784
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Issue date Jul 27, 1993
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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H01 - BASIC ELECTRIC ELEMENTS
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Laser ablation apparatus
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Patent number 5,227,608
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Issue date Jul 13, 1993
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Matsuhita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Evaporation apparatus
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Patent number 5,180,433
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Issue date Jan 19, 1993
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Matsushita Electric Industrial Co., Ltd.
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Akira Okuda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Laser sputtering apparatus
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Patent number 5,159,169
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Issue date Oct 27, 1992
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Matsushita Electric Industrial Co., Ltd.
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Yukio Nishikawa
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Laser sputtering apparatus
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Patent number 5,065,697
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Issue date Nov 19, 1991
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Patent number 5,037,521
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Issue date Aug 6, 1991
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Matsushita Electric Ind., Ltd.
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Yukio Nishikawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Laser sputtering apparatus
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Patent number 5,017,277
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Issue date May 21, 1991
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Patent number 5,006,218
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Issue date Apr 9, 1991
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Ion source
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Patent number 4,931,698
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Issue date Jun 5, 1990
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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H01 - BASIC ELECTRIC ELEMENTS
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Metal ion source
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Patent number 4,846,953
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Issue date Jul 11, 1989
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Matsushita Electric Industrial Co., Ltd.
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Yoshikazu Yoshida
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H01 - BASIC ELECTRIC ELEMENTS