TREA

Yoshiki FUKUHARA

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus
    • Patent number 9,163,311
    • Issue date Oct 20, 2015
    • Tokyo Electron Limited
    • Harunari Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20120180727
    • Publication date Jul 19, 2012
    • TOKYO ELECTRON LIMITED
    • Harunari HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...