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Yoshiki Kojima

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  • Itami, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Alignment mark for electron beam lithography
    • Patent number 6,118,128
    • Issue date Sep 12, 2000
    • Mitsubishi Denki Kabushiki Kaisha
    • Yoshiki Kojima
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Pattern transfer mask
    • Patent number 5,547,789
    • Issue date Aug 20, 1996
    • Mitsubishi Denki Kabushiki Kaisha
    • Mitsunori Nakatani
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method for producing field effect transistor
    • Patent number 5,395,739
    • Issue date Mar 7, 1995
    • Mitsubishi Denki Kabushiki Kaisha
    • Mitsunori Nakatani
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY