Yoshiki Okamoto

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,554,389
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Akihiro Kubo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,532,487
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dressing apparatus and dressing method for substrate rear surface p...
- Patent number 11,059,145
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,840,079
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,470,979
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,304,398
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Development processing device
- Patent number 7,819,594
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Hideo Funakoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20230381825
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
- Publication number 20210308828
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210220878
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...
- Publication number 20210039221
- Publication date Feb 11, 2021
- Tokyo Electron Limited
- Nozomu KANETAKE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200365417
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
- Publication number 20190047118
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20180151343
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20160202609
- Publication date Jul 14, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20140071411
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Development processing device
- Publication number 20080176172
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Hideo Funakoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoshiki Okamoto

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus and substrate cleaning method

Substrate processing apparatus

Dressing apparatus and dressing method for substrate rear surface p...

Substrate processing apparatus, substrate processing method and sto...

Developing treatment apparatus and developing treatment method

Developing treatment apparatus and developing treatment method

Development processing device

Patents Applicationslast 30 patents

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...

Substrate Processing Apparatus, Substrate Processing Method and Sto...

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

Development processing device