Yoshimasa Fukushima

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and vibration damper for charged pa...
- Patent number 10,056,226
- Issue date Aug 21, 2018
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device
- Patent number 8,823,309
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for electron-beam lithography
- Patent number 7,276,709
- Issue date Oct 2, 2007
- Hitachi High-Technologies Corporation
- Yoshimasa Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam drawing apparatus
- Patent number 6,794,665
- Issue date Sep 21, 2004
- Hitachi High-Technologies Corporation
- Masaki Kurihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evacuation use sample chamber and circuit pattern forming apparatus...
- Patent number 6,744,054
- Issue date Jun 1, 2004
- Hitachi, Ltd.
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lithography apparatus
- Patent number 6,730,916
- Issue date May 4, 2004
- Canon Kabushiki Kaisha
- Hiroshi Tsuji
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Travelling worktable apparatus
- Patent number 6,659,441
- Issue date Dec 9, 2003
- Hitachi, Ltd.
- Masaki Mizuochi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Travelling worktable apparatus
- Patent number 6,446,950
- Issue date Sep 10, 2002
- Hitachi, Ltd.
- Masaki Mizuochi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device inspection and analysis method and its apparat...
- Patent number 6,281,024
- Issue date Aug 28, 2001
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing unit and apparatus
- Patent number 4,824,309
- Issue date Apr 25, 1989
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling sample temperature
- Patent number 4,565,601
- Issue date Jan 21, 1986
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PA...
- Publication number 20170250054
- Publication date Aug 31, 2017
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device
- Publication number 20120145920
- Publication date Jun 14, 2012
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for electron-beam lithography
- Publication number 20050230637
- Publication date Oct 20, 2005
- Yoshimasa Fukushima
- B82 - NANO-TECHNOLOGY
Information Patent Application
Stage apparatus, static pressure bearing apparatus, positioning met...
- Publication number 20050002012
- Publication date Jan 6, 2005
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G11 - INFORMATION STORAGE
Information Patent Application
Sample-setting moving stage, manufacturing apparatus for circuit pa...
- Publication number 20040250776
- Publication date Dec 16, 2004
- Masaki Mizuochi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electron beam drawing apparatus
- Publication number 20030197134
- Publication date Oct 23, 2003
- Hitachi High-Technologies Corporation
- Masaki Kurihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Travelling worktable apparatus
- Publication number 20030020225
- Publication date Jan 30, 2003
- Hitachi, Ltd
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Travelling worktable apparatus
- Publication number 20020185799
- Publication date Dec 12, 2002
- Hitachi, Ltd
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Evacuation use sample chamber and circuit pattern forming apparatus...
- Publication number 20020070345
- Publication date Jun 13, 2002
- Hitachi, Ltd
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Travelling worktable apparatus
- Publication number 20010024008
- Publication date Sep 27, 2001
- Hitachi, Ltd.
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS

Yoshimasa Fukushima

Person

Patents Grantslast 30 patents

Charged particle beam apparatus and vibration damper for charged pa...

Stage device

System and method for electron-beam lithography

Electron beam drawing apparatus

Evacuation use sample chamber and circuit pattern forming apparatus...

Electron beam lithography apparatus

Travelling worktable apparatus

Travelling worktable apparatus

Semiconductor device inspection and analysis method and its apparat...

Vacuum processing unit and apparatus

Method and apparatus for controlling sample temperature

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PA...

Stage Device

System and method for electron-beam lithography

Stage apparatus, static pressure bearing apparatus, positioning met...

Sample-setting moving stage, manufacturing apparatus for circuit pa...

Electron beam drawing apparatus

Travelling worktable apparatus

Travelling worktable apparatus

Evacuation use sample chamber and circuit pattern forming apparatus...

Travelling worktable apparatus