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Yoshimasa Kawase
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Kanagawa, JP
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last 30 patents
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Patent Grant
Wafer heat-treatment system and wafer heat-treatment method
Patent number
6,769,908
Issue date
Aug 3, 2004
Semiconductor Leading Edge Technologies, Inc.
Yoshimasa Kawase
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Wafer heat-treatment system and wafer heat-treatment method
Publication number
20020148135
Publication date
Oct 17, 2002
Semiconductor Leading Edge Technologies, Inc.
Yoshimasa Kawase
H01 - BASIC ELECTRIC ELEMENTS