Yoshimasa Ohshima

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,559,000
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,508,727
- Issue date Aug 13, 2013
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 8,289,507
- Issue date Oct 16, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,274,651
- Issue date Sep 25, 2012
- Hitachi, Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,269,959
- Issue date Sep 18, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,228,495
- Issue date Jul 24, 2012
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,094,295
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,040,503
- Issue date Oct 18, 2011
- Hitachi, Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,013,989
- Issue date Sep 6, 2011
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,952,700
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting defects on an object
- Patent number 7,940,383
- Issue date May 10, 2011
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for inspecting defect and apparatus for inspecting defect
- Patent number 7,903,244
- Issue date Mar 8, 2011
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,817,261
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 7,768,634
- Issue date Aug 3, 2010
- Hitachi High-Technologies Corporation
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,692,779
- Issue date Apr 6, 2010
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 7,643,138
- Issue date Jan 5, 2010
- Hitachi, Ltd.
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for detecting defects
- Patent number 7,643,139
- Issue date Jan 5, 2010
- Hitachi High-Technologies Corporation
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,639,350
- Issue date Dec 29, 2009
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting defect and apparatus for inspecting defect
- Patent number 7,586,594
- Issue date Sep 8, 2009
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 7,586,593
- Issue date Sep 8, 2009
- Hitachi High-Tech Electronics Engineering Co., Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting defects on a wafer
- Patent number 7,567,343
- Issue date Jul 28, 2009
- Hitachi High-Technologies Corporation
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,443,496
- Issue date Oct 28, 2008
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting defects
- Patent number 7,426,023
- Issue date Sep 16, 2008
- Hitachi, Ltd.
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Grant
Defect detector and defect detecting method
- Patent number 7,417,721
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 7,417,723
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its apparatus for inspecting particles or defects of a s...
- Patent number 7,411,207
- Issue date Aug 12, 2008
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,369,223
- Issue date May 6, 2008
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device inspection method
- Patent number 7,332,359
- Issue date Feb 19, 2008
- Hitachi, Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 7,315,363
- Issue date Jan 1, 2008
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method and its apparatus for inspecting particles or defects of a s...
- Patent number 7,262,425
- Issue date Aug 28, 2007
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20120312104
- Publication date Dec 13, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20120262709
- Publication date Oct 18, 2012
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20120133929
- Publication date May 31, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20120006131
- Publication date Jan 12, 2012
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20110310382
- Publication date Dec 22, 2011
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110228258
- Publication date Sep 22, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110032515
- Publication date Feb 10, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20100259751
- Publication date Oct 14, 2010
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20100140474
- Publication date Jun 10, 2010
- Akira HAMAMATSU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20100103409
- Publication date Apr 29, 2010
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Application
Apparatus And Method For Testing Defects
- Publication number 20100088042
- Publication date Apr 8, 2010
- Minori NOGUCHI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20100002227
- Publication date Jan 7, 2010
- Akira HAMAMATSU
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT
- Publication number 20090323054
- Publication date Dec 31, 2009
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
Defects Inspecting Apparatus And Defects Inspecting Method
- Publication number 20090033924
- Publication date Feb 5, 2009
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20080291437
- Publication date Nov 27, 2008
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method Of Apparatus For Detecting Particles On A Specimen
- Publication number 20080204724
- Publication date Aug 28, 2008
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND ITS APPARATUS FOR INSPECTING PARTICLES OR DEFECTS OF A S...
- Publication number 20070265797
- Publication date Nov 15, 2007
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT
- Publication number 20070247616
- Publication date Oct 25, 2007
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146696
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146697
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for detecting defects on a wafer
- Publication number 20070070337
- Publication date Mar 29, 2007
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus
- Publication number 20070070339
- Publication date Mar 29, 2007
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting a semiconductor device and an apparatus thereof
- Publication number 20060215153
- Publication date Sep 28, 2006
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for detecting defects
- Publication number 20060139629
- Publication date Jun 29, 2006
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Application
Defect detector and defect detecting method
- Publication number 20060124874
- Publication date Jun 15, 2006
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for detecting defects
- Publication number 20060068512
- Publication date Mar 30, 2006
- Yoshimasa Ohshima
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030060
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030059
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Method and its apparatus for inspecting particles or defects of a s...
- Publication number 20050264798
- Publication date Dec 1, 2005
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for detecting defects
- Publication number 20050264797
- Publication date Dec 1, 2005
- Hiroyuki Nakano
- G01 - MEASURING TESTING

Yoshimasa Ohshima

Person

Patents Grantslast 30 patents

Method of inspecting a semiconductor device and an apparatus thereof

Defects inspecting apparatus and defects inspecting method

Method of apparatus for detecting particles on a specimen

Method of inspecting a semiconductor device and an apparatus thereof

Inspection method and inspection apparatus

Defects inspecting apparatus and defects inspecting method

Inspection method and inspection apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Defects inspecting apparatus and defects inspecting method

Method of apparatus for detecting particles on a specimen

Method of detecting defects on an object

Method for inspecting defect and apparatus for inspecting defect

Method of apparatus for detecting particles on a specimen

Defects inspecting apparatus and defects inspecting method

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof

Method and apparatus for detecting defects

Apparatus and method for testing defects

Method for inspecting defect and apparatus for inspecting defect

Inspection method and inspection apparatus

Method and apparatus for detecting defects on a wafer

Apparatus and method for testing defects

Method and apparatus for detecting defects

Defect detector and defect detecting method

Method of inspecting a semiconductor device and an apparatus thereof

Method and its apparatus for inspecting particles or defects of a s...

Method of apparatus for detecting particles on a specimen

Semiconductor device inspection method

Inspection method and inspection apparatus

Method and its apparatus for inspecting particles or defects of a s...

Patents Applicationslast 30 patents

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

INSPECTION METHOD AND INSPECTION APPARATUS

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

METHOD AND APPARATUS FOR DETECTING DEFECTS

Apparatus And Method For Testing Defects

INSPECTION METHOD AND INSPECTION APPARATUS

METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT

Defects Inspecting Apparatus And Defects Inspecting Method

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

Method Of Apparatus For Detecting Particles On A Specimen

METHOD AND ITS APPARATUS FOR INSPECTING PARTICLES OR DEFECTS OF A S...

METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT

APPARATUS AND METHOD FOR TESTING DEFECTS

APPARATUS AND METHOD FOR TESTING DEFECTS

Method and apparatus for detecting defects on a wafer

Inspection method and inspection apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Method and apparatus for detecting defects

Defect detector and defect detecting method

Method and apparatus for detecting defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Method and its apparatus for inspecting particles or defects of a s...

Method and apparatus for detecting defects