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Inspection apparatus
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Patent number 9,506,872
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Issue date Nov 29, 2016
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Hitachi High-Technologies Corporation
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Yoshimasa Oshima
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G01 - MEASURING TESTING
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Inspection apparatus
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Patent number 8,705,026
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Issue date Apr 22, 2014
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Hitachi High-Technologies Corporation
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Yoshimasa Oshima
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G01 - MEASURING TESTING
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Defect inspection method
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Patent number 8,482,727
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Issue date Jul 9, 2013
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Hitachi High-Technologies Corporation
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Toshiyuki Nakao
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G01 - MEASURING TESTING
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Defect inspection apparatus
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Patent number 8,477,302
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Issue date Jul 2, 2013
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Hitachi High-Technologies Corporation
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Yuta Urano
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G01 - MEASURING TESTING
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Inspection apparatus
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Patent number 8,264,679
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Issue date Sep 11, 2012
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Hitachi High-Technologies Corporation
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Yoshimasa Oshima
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G01 - MEASURING TESTING
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Inspection apparatus
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Patent number 8,120,766
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Issue date Feb 21, 2012
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Hitachi High-Technologies Corporation
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Yoshimasa Oshima
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G01 - MEASURING TESTING
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Defect inspection method
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Patent number 7,916,288
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Issue date Mar 29, 2011
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Hitachi High-Technologies Corporation
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Toshiyuki Nakao
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G01 - MEASURING TESTING
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Defect inspection method
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Patent number 7,675,613
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Issue date Mar 9, 2010
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Hitachi High-Technologies Corporation
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Toshiyuki Nakao
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G01 - MEASURING TESTING
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Pattern detection system
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Patent number 4,508,453
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Issue date Apr 2, 1985
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Hitachi, Ltd.
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Yasuhiko Hara
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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