Yoshimasa Watanabe

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming boron-based film, formation apparatus
- Patent number 11,615,957
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of filling recess
- Patent number 11,177,133
- Issue date Nov 16, 2021
- Tokyo Electron Limited
- Satoshi Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming boron-based film, and film forming apparatus
- Patent number 11,145,522
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Yoshimasa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, boron film, and film forming apparatus
- Patent number 10,388,524
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM
- Publication number 20230197447
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Kota UMEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS
- Publication number 20210090888
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Filling Recess
- Publication number 20200161135
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Satoshi TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON-BASED FILM FORMING METHOD AND APPARATUS
- Publication number 20190301019
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Yoshimasa WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Boron-Based Film, and Film Forming Apparatus
- Publication number 20190244838
- Publication date Aug 8, 2019
- TOKYO ELECTRON LIMITED
- Yoshimasa WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATU...
- Publication number 20180350598
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Yoshimasa WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Method, Boron Film, and Film Forming Apparatus
- Publication number 20180174838
- Publication date Jun 21, 2018
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMAGNETIC HEATING DEVICE AND ELECTROMAGNETIC HEATING METHOD
- Publication number 20150289316
- Publication date Oct 8, 2015
- TOKYO ELECTRON LIMITED
- Masahiro SHIMIZU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND ANNEALING METHOD
- Publication number 20150132930
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Yoshimasa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING OBJECT
- Publication number 20140038430
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Yoshiro Kabe
- H01 - BASIC ELECTRIC ELEMENTS

Yoshimasa Watanabe

Person

Patents Grantslast 30 patents

Method for forming boron-based film, formation apparatus

Method of filling recess

Method of forming boron-based film, and film forming apparatus

Film forming method, boron film, and film forming apparatus

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM

METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS

Method of Filling Recess

BORON-BASED FILM FORMING METHOD AND APPARATUS

Method of Forming Boron-Based Film, and Film Forming Apparatus

BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATU...

Film Forming Method, Boron Film, and Film Forming Apparatus

ELECTROMAGNETIC HEATING DEVICE AND ELECTROMAGNETIC HEATING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND ANNEALING METHOD

METHOD FOR PROCESSING OBJECT