Yoshimi Takano

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, method of obtaining amount of regulation of obj...
- Patent number 9,310,695
- Issue date Apr 12, 2016
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, METHOD OF OBTAINING AMOUNT OF REGULATION OF OBJ...
- Publication number 20140313499
- Publication date Oct 23, 2014
- Youzou Fukagawa
- G02 - OPTICS