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Yoshimi Watabe
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma treatment system and cleaning method of the same
Patent number
8,002,947
Issue date
Aug 23, 2011
Sanyo Electric Co., LTD
Yoichiro Numasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cooling device for vacuum treatment device
Patent number
7,913,752
Issue date
Mar 29, 2011
Ishikawajima-Harima Heavy Industries Co., Ltd.
Masashi Ueda
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Plasma treatment system and cleaning method of the same
Patent number
7,530,359
Issue date
May 12, 2009
Canon Anelva Corporation
Yoichiro Numasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor thin film forming system
Patent number
7,312,418
Issue date
Dec 25, 2007
NEC Corporation
Hiroshi Tanabe
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
S system for the formation of a silicon thin film and a semiconduct...
Patent number
6,861,614
Issue date
Mar 1, 2005
NEC Corporation
Hiroshi Tanabe
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma processing system
Patent number
6,664,496
Issue date
Dec 16, 2003
Anelva Corporation
Yoshimi Watabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film formation by inductively-coupled plasma CVD process
Patent number
6,503,816
Issue date
Jan 7, 2003
National Institute of Advanced Industrial Science and Technology
Norikazu Ito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD apparatus suitable for manufacturing solar cell and the...
Patent number
6,189,485
Issue date
Feb 20, 2001
Anelva Corporation
Akihisa Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD process for forming amorphous silicon thin film
Patent number
5,437,895
Issue date
Aug 1, 1995
Anelva Corporation
Akira Kodama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma treatment system and cleaning method of the same
Publication number
20090095217
Publication date
Apr 16, 2009
Canon ANELVA Corporation
Yoichiro Numasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR THIN FILM FORMING SYSTEM
Publication number
20070166945
Publication date
Jul 19, 2007
Hiroshi Tanabe
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Semiconductor thin film forming system
Publication number
20050109743
Publication date
May 26, 2005
Hiroshi Tanabe
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Discharge apparatus, plasma processing method and solar cell
Publication number
20050067934
Publication date
Mar 31, 2005
Ishikawajima-Harima Heavy Industries Co., Ltd.
Masashi Ueda
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Plasma processing device and method of cleaning the same
Publication number
20040149386
Publication date
Aug 5, 2004
Yoichiro Numasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma processing system
Publication number
20020144980
Publication date
Oct 10, 2002
ANELVA CORPORATION
Yoshimi Watabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thin film forming method, thin film forming apparatus and solar cell
Publication number
20010031542
Publication date
Oct 18, 2001
Norikazu Ito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...