Yoshimitsu KATO

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Yokkaichi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, surface position control method, exposure metho...
- Patent number 10,488,761
- Issue date Nov 26, 2019
- TOSHIBA MEMORY CORPORATION
- Yoshimitsu Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer lithography equipment
- Patent number 9,760,017
- Issue date Sep 12, 2017
- TOSHIBA MEMORY CORPORATION
- Kazufumi Shiozawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light exposure condition analysis method, nontransitory computer re...
- Patent number 9,368,413
- Issue date Jun 14, 2016
- Kabushiki Kaisha Toshiba
- Nobuhiro Komine
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, SURFACE POSITION CONTROL METHOD, EXPOSURE METHO...
- Publication number 20190079402
- Publication date Mar 14, 2019
- Toshiba Memory Corporation
- Yoshimitsu Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER LITHOGRAPHY EQUIPMENT
- Publication number 20160274470
- Publication date Sep 22, 2016
- KABUSHIKI KAISHA TOSHIBA
- Kazufumi SHIOZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EXPOSURE CONDITION ANALYSIS METHOD, NONTRANSITORY COMPUTER RE...
- Publication number 20160005661
- Publication date Jan 7, 2016
- KABUSHIKI KAISHA TOSHIBA
- Nobuhiro KOMINE
- G01 - MEASURING TESTING