Yoshimitu Shimane

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, mask alignment method, and vacuum proc...
- Patent number 9,082,803
- Issue date Jul 14, 2015
- Canon Anelva Corporation
- Yoshimitu Shimane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate Holding Apparatus, Mask Alignment Method, and Vacuum Proc...
- Publication number 20110051115
- Publication date Mar 3, 2011
- Canon ANELVA Corporation
- Yoshimitu Shimane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...