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Yoshinao HIRABAYASHI
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Matsumoto-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Mapping-projection-type electron beam apparatus for inspecting samp...
Patent number
8,124,933
Issue date
Feb 28, 2012
Ebara Corporation
Kenji Watanabe
G01 - MEASURING TESTING
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Patent Grant
Mapping-projection-type electron beam apparatus for inspecting samp...
Patent number
7,592,586
Issue date
Sep 22, 2009
Ebara Corporation
Kenji Watanabe
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMP...
Publication number
20100019149
Publication date
Jan 28, 2010
EBARA CORPORATION
Kenji WATANABE
G01 - MEASURING TESTING
Information
Patent Application
Mapping-projection-type electron beam apparatus for inspecting samp...
Publication number
20060237646
Publication date
Oct 26, 2006
Kenji Watanabe
G01 - MEASURING TESTING