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Yoshinari Matsushita
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Hirakata, JP
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last 30 patents
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Patent Grant
Vertical load-lock reduced-pressure type chemical vapor deposition...
Patent number
5,058,526
Issue date
Oct 22, 1991
Matsushita Electric Industrial Co., Ltd.
Yoshinari Matsushita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition reaction apparatus having isolated reacti...
Patent number
4,962,726
Issue date
Oct 16, 1990
Matsushita Electric Industrial Co., Ltd.
Yoshinari Matsushita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...