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Yoshinobu Ise
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Iwate, JP
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last 30 patents
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Patent Grant
Film deposition method
Patent number
8,962,495
Issue date
Feb 24, 2015
Tokyo Electron Limited
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method of forming thin film including adsorption step...
Patent number
8,778,812
Issue date
Jul 15, 2014
Tokyo Electron Limited
Haruhiko Furuya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FILM DEPOSITION METHOD
Publication number
20130337658
Publication date
Dec 19, 2013
TOKYO ELECTRON LIMITED
Hiroaki Ikegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD
Publication number
20130164945
Publication date
Jun 27, 2013
TOKYO ELECTRON LIMITED
Haruhiko FURUYA
H01 - BASIC ELECTRIC ELEMENTS