Yoshinobu Kawai

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Fukuoka-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of measuring negative ion density of plasma and plasma proce...
- Patent number 6,452,400
- Issue date Sep 17, 2002
- Tokyo Electron Limited
- Yoshinobu Kawai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 6,431,114
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Issei Imahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and system
- Patent number 6,066,568
- Issue date May 23, 2000
- Tokyo Electron Limited
- Yoshinobu Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus
- Patent number 5,172,083
- Issue date Dec 15, 1992
- Nippon Steel Corporation
- Ryota Hidaka
- H01 - BASIC ELECTRIC ELEMENTS