Yoshinobu Kawata

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Fukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for manufacturing semiconductor and method of manufacturi...
- Patent number 5,445,677
- Issue date Aug 29, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Yoshinobu Kawata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber for a chemical vapor deposition apparatus and a ch...
- Patent number 5,425,812
- Issue date Jun 20, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Tsutahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition method, and chemical vapor deposition tre...
- Patent number 5,338,363
- Issue date Aug 16, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Yoshinobu Kawata
- C30 - CRYSTAL GROWTH