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Yoshinobu MOTODATE
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Sendai-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Thermal processing apparatus, thermal processing method, and storag...
Patent number
8,565,911
Issue date
Oct 22, 2013
Tokyo Electron Limited
Yo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing apparatus, thermal processing method, and storag...
Patent number
8,423,175
Issue date
Apr 16, 2013
Tokyo Electron Limited
Yo Abe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND STORAG...
Publication number
20130204425
Publication date
Aug 8, 2013
TOKYO ELECTRON LIMITED
Yo ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND STORAG...
Publication number
20100057249
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Yo ABE
H01 - BASIC ELECTRIC ELEMENTS