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Yoshinobu Nagano
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Kyoto, JP
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last 30 patents
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Patent Grant
Microwave plasma torch having discretely positioned gas injection h...
Patent number
5,734,143
Issue date
Mar 31, 1998
Matsushita Electric Industrial Co., Ltd.
Toru Kawase
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dry etching process utilizing a recessed electrode
Patent number
5,443,689
Issue date
Aug 22, 1995
Matsushita Electric Industrial Co., Ltd.
Tadashi Kimura
H01 - BASIC ELECTRIC ELEMENTS