Yoshinobu NAKAMURA

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,640,869
- Issue date May 5, 2020
- Kokusai Electric Corporation
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device, substrate-processing...
- Patent number 10,497,561
- Issue date Dec 3, 2019
- Kokusai Electric Corporation
- Yoshinobu Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device, substrate-processing...
- Patent number 10,229,829
- Issue date Mar 12, 2019
- Kokusai Electric Corporation
- Yoshinobu Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device, substrate-processing...
- Patent number 10,163,625
- Issue date Dec 25, 2018
- Hitachi Kokusai Electric Inc.
- Yoshinobu Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device, substrate-processing...
- Patent number 10,121,654
- Issue date Nov 6, 2018
- Hitachi Kokusai Electric Inc.
- Yoshinobu Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of cleaning in...
- Patent number 9,895,727
- Issue date Feb 20, 2018
- Hitachi Kokusai Electric, Inc.
- Yoshinobu Nakamura
- B08 - CLEANING
Information Patent Grant
Method of manufacturing a SiOCN film, substrate processing apparatu...
- Patent number 9,837,262
- Issue date Dec 5, 2017
- Hitachi Kokusai Electric, Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,691,606
- Issue date Jun 27, 2017
- Hitachi Kokusai Electric, Inc.
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,455,137
- Issue date Sep 27, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,431,236
- Issue date Aug 30, 2016
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a SiOCN film, substrate processing apparatu...
- Patent number 9,412,585
- Issue date Aug 9, 2016
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,390,911
- Issue date Jul 12, 2016
- Hitachi Kokusai Electric, Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 9,378,943
- Issue date Jun 28, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a SiOCN film, substrate processing apparatu...
- Patent number 9,263,253
- Issue date Feb 16, 2016
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,218,955
- Issue date Dec 22, 2015
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,136,114
- Issue date Sep 15, 2015
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 8,951,919
- Issue date Feb 10, 2015
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 8,946,092
- Issue date Feb 3, 2015
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 8,728,954
- Issue date May 20, 2014
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 8,546,272
- Issue date Oct 1, 2013
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING...
- Publication number 20190189422
- Publication date Jun 20, 2019
- Kokusai Electric Corporation
- Yoshinobu NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093222
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING...
- Publication number 20180233351
- Publication date Aug 16, 2018
- Hitachi Kokusai Electric Inc.
- Yoshinobu NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING...
- Publication number 20170103885
- Publication date Apr 13, 2017
- Hitachi Kokusai Electric Inc.
- Yoshinobu NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170087606
- Publication date Mar 30, 2017
- Hitachi Kokusai Electric Inc.
- Yoshinobu NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160314959
- Publication date Oct 27, 2016
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160013042
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Yoshitomo HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20160013044
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150262809
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150126043
- Publication date May 7, 2015
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150101755
- Publication date Apr 16, 2015
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140220787
- Publication date Aug 7, 2014
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140080314
- Publication date Mar 20, 2014
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140080319
- Publication date Mar 20, 2014
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140051260
- Publication date Feb 20, 2014
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20140024225
- Publication date Jan 23, 2014
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20130273748
- Publication date Oct 17, 2013
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20130252439
- Publication date Sep 26, 2013
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20120184110
- Publication date Jul 19, 2012
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20110256733
- Publication date Oct 20, 2011
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yoshinobu NAKAMURA

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Method for manufacturing semiconductor device, substrate-processing...

Method for manufacturing semiconductor device, substrate-processing...

Method for manufacturing semiconductor device, substrate-processing...

Method for manufacturing semiconductor device, substrate-processing...

Method of manufacturing semiconductor device, method of cleaning in...

Method of manufacturing a SiOCN film, substrate processing apparatu...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing a SiOCN film, substrate processing apparatu...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, method of processing...

Method of manufacturing a SiOCN film, substrate processing apparatu...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, method of processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, method of processing...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...