TREA

Yoshinobu OHYA

Follow

Person

  • Nirasaki-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 11,075,062
    • Issue date Jul 27, 2021
    • Tokyo Electron Limited
    • Yun Mo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 10,854,431
    • Issue date Dec 1, 2020
    • Tokyo Electron Limited
    • Akira Koshiishi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Etching process method
    • Patent number 10,600,654
    • Issue date Mar 24, 2020
    • Tokyo Electron Limited
    • Maju Tomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 10,546,727
    • Issue date Jan 28, 2020
    • Tokyo Electron Limited
    • Akira Koshiishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 9,490,105
    • Issue date Nov 8, 2016
    • Tokyo Electron Limited
    • Akira Koshiishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 8,603,293
    • Issue date Dec 10, 2013
    • Tokyo Electron Limited
    • Akira Koshiishi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20210082669
    • Publication date Mar 18, 2021
    • TOKYO ELECTRON LIMITED
    • Akira KOSHIISHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20200161105
    • Publication date May 21, 2020
    • TOKYO ELECTRON LIMITED
    • Yun Mo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20200111645
    • Publication date Apr 9, 2020
    • TOKYO ELECTRON LIMITED
    • Akira KOSHIISHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING PROCESS METHOD
    • Publication number 20170358460
    • Publication date Dec 14, 2017
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20160379805
    • Publication date Dec 29, 2016
    • TOKYO ELECTRON LIMITED
    • Akira KOSHIISHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20140124139
    • Publication date May 8, 2014
    • TOKYO ELECTRON LIMITED
    • Akira KOSHIISHI
    • H01 - BASIC ELECTRIC ELEMENTS