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Yoshinobu OOYA
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching method
Patent number
10,410,877
Issue date
Sep 10, 2019
Tokyo Electron Limited
Ryuichi Takashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,381,237
Issue date
Aug 13, 2019
Tokyo Electron Limited
Ryohei Takeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
9,997,374
Issue date
Jun 12, 2018
Tokyo Electron Limited
Ryohei Takeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
9,922,806
Issue date
Mar 20, 2018
Tokyo Electron Limited
Maju Tomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for calculating distance, method for neutralizing electrosta...
Patent number
9,812,996
Issue date
Nov 7, 2017
Tokyo Electron Limited
Kenji Nagai
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Etching method and etching apparatus
Patent number
9,659,789
Issue date
May 23, 2017
Tokyo Electron Limited
Ryohei Takeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
9,478,387
Issue date
Oct 25, 2016
Tokyo Electron Limited
Yoshinobu Ooya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
8,906,808
Issue date
Dec 9, 2014
Tokyo Electron Limited
Ryuichi Takashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
8,790,489
Issue date
Jul 29, 2014
Tokyo Electron Limited
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
8,642,478
Issue date
Feb 4, 2014
Tokyo Electron Limited
Yoshinobu Ooya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus, plasma etching method and storage medium
Patent number
8,641,916
Issue date
Feb 4, 2014
Tokyo Electron Limited
Koichi Yatsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
8,420,547
Issue date
Apr 16, 2013
Tokyo Electron Limited
Yoshinobu Ooya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method, plasma etching apparatus and storage medium
Patent number
8,383,001
Issue date
Feb 26, 2013
Tokyo Electron Limited
Hiromasa Mochiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
7,988,816
Issue date
Aug 2, 2011
Tokyo Electron Limited
Akira Koshiishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210272780
Publication date
Sep 2, 2021
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20180261465
Publication date
Sep 13, 2018
TOKYO ELECTRON LIMITED
Ryohei TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20180174805
Publication date
Jun 21, 2018
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20170178921
Publication date
Jun 22, 2017
TOKYO ELECTRON LIMITED
Ryohei TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20170178922
Publication date
Jun 22, 2017
TOKYO ELECTRON LIMITED
Ryuichi TAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20160379856
Publication date
Dec 29, 2016
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20160189975
Publication date
Jun 30, 2016
TOKYO ELECTRON LIMITED
Ryohei TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CALCULATING DISTANCE, METHOD FOR NEUTRALIZING ELECTROSTA...
Publication number
20150162233
Publication date
Jun 11, 2015
TOKYO ELECTRON LIMITED
Kenji NAGAI
G01 - MEASURING TESTING
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20140102638
Publication date
Apr 17, 2014
TOKYO ELECTRON LIMITED
Yoshinobu Ooya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20140011363
Publication date
Jan 9, 2014
TOKYO ELECTRON LIMITED
Ryuichi TAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20120214313
Publication date
Aug 23, 2012
TOKYO ELECTRON LIMITED
Yoshinobu Ooya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20120000886
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Masanobu HONDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20110272097
Publication date
Nov 10, 2011
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND STORAGE MEDIUM
Publication number
20100213162
Publication date
Aug 26, 2010
TOKYO ELECTRON LIMITED
Hiromasa Mochiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20100210114
Publication date
Aug 19, 2010
TOKYO ELECTRON LIMITED
Yoshinobu OOYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD AND STORAGE MEDIUM
Publication number
20100190350
Publication date
Jul 29, 2010
TOKYO ELECTRON LIMITED
Koichi YATSUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AN...
Publication number
20090170335
Publication date
Jul 2, 2009
TOKYO ELECTRON LIMITED
Satoshi TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20060066247
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma ashing method
Publication number
20050106875
Publication date
May 19, 2005
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS