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Yoshinobu SHIBA

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  • Sendai-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for producing silicon nitride film
    • Patent number 11,495,452
    • Issue date Nov 8, 2022
    • TOHKU UNIVERSITY
    • Akinobu Teramoto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of forming nitride film
    • Patent number 10,927,454
    • Issue date Feb 23, 2021
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Shinichi Nishimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 10,559,460
    • Issue date Feb 11, 2020
    • Tokyo Electron Limited
    • Akira Shimizu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR PRODUCING SILICON NITRIDE FILM
    • Publication number 20200335322
    • Publication date Oct 22, 2020
    • Tohoku University
    • Akinobu TERAMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF FORMING NITRIDE FILM
    • Publication number 20190390332
    • Publication date Dec 26, 2019
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Shinichi NISHIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20190074177
    • Publication date Mar 7, 2019
    • TOKYO ELECTRON LIMITED
    • Akira SHIMIZU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...