Yoshinobu TANAKA

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Amagasaki City, JP

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING SILICON OXIDE FILM AND METHOD FOR MANUFACTURING...
- Publication number 20120003842
- Publication date Jan 5, 2012
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS RING, APPARATUS FOR PROCESSING SEMICONDUCTOR SUBSTRATE, THE APP...
- Publication number 20090311872
- Publication date Dec 17, 2009
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...