Yoshinori Fujii

Person

Susono, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Magnet unit for magnetron sputtering apparatus
- Patent number 11,239,064
- Issue date Feb 1, 2022
- ULVAC, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of forming film
- Patent number 11,230,760
- Issue date Jan 25, 2022
- ULVAC, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target assembly
- Patent number 10,435,783
- Issue date Oct 8, 2019
- ULVAC, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of discriminating state thereof
- Patent number 10,233,536
- Issue date Mar 19, 2019
- ULVAC, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target assembly
- Patent number 9,972,479
- Issue date May 15, 2018
- ULVAC, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF sputtering apparatus and sputtering method
- Patent number 9,960,018
- Issue date May 1, 2018
- ULVAC, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport apparatus and vacuum system
- Patent number 9,139,381
- Issue date Sep 22, 2015
- Ulvac, Inc.
- Yoshinori Fujii
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Transport method
- Patent number 9,093,485
- Issue date Jul 28, 2015
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 8,956,513
- Issue date Feb 17, 2015
- ULVAC, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Operation monitoring system for processing apparatus
- Patent number 8,688,246
- Issue date Apr 1, 2014
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching method for transfer robot
- Patent number 8,688,276
- Issue date Apr 1, 2014
- ULVAC, Inc.
- Yoshinori Fujii
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method of controlling transfer robot
- Patent number 8,543,235
- Issue date Sep 24, 2013
- ULVAC, Inc.
- Yoshinori Fujii
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Robot hand for substrate transfer
- Patent number 8,393,662
- Issue date Mar 12, 2013
- ULVAC, Inc.
- Yoshinori Fujii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of detecting stop of transport apparatus
- Patent number 8,390,230
- Issue date Mar 5, 2013
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot hand for substrate transfer
- Patent number 8,141,926
- Issue date Mar 27, 2012
- ULVAC, Inc.
- Yoshinori Fujii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Position correcting apparatus, vacuum processing equipment and posi...
- Patent number 7,918,640
- Issue date Apr 5, 2011
- Ulvac, Inc.
- Yoshinori Fujii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck device
- Patent number 7,821,767
- Issue date Oct 26, 2010
- Ulvac, Inc.
- Yoshinori Fujii
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate temperature measurement apparatus and processing apparatus
- Patent number 7,604,401
- Issue date Oct 20, 2009
- UL Vac, Inc.
- Yoshinori Fujii
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD
- Publication number 20240069519
- Publication date Feb 29, 2024
- Ulvac, Inc.
- Yoshinori FUJII
- G05 - CONTROLLING REGULATING
Information Patent Application
Magnet Unit for Magnetron Sputtering Apparatus
- Publication number 20210249241
- Publication date Aug 12, 2021
- Ulvac, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sputtering Apparatus and Method of Forming Film
- Publication number 20210214841
- Publication date Jul 15, 2021
- Ulvac, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Method and Sputtering Apparatus
- Publication number 20210079514
- Publication date Mar 18, 2021
- Ulvac, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION GUARD PLATE AND SPUTTERING DEVICE
- Publication number 20190378701
- Publication date Dec 12, 2019
- ULVAC, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND SPUTTERING APPARATUS
- Publication number 20190078196
- Publication date Mar 14, 2019
- Ulvac, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron Sputtering Apparatus
- Publication number 20180155821
- Publication date Jun 7, 2018
- Ulvac, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus and Method of Discriminating State Thereof
- Publication number 20170283940
- Publication date Oct 5, 2017
- Ulvac, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Target Assembly
- Publication number 20170268097
- Publication date Sep 21, 2017
- Ulvac, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGET ASSEMBLY
- Publication number 20170229296
- Publication date Aug 10, 2017
- Ulvac, Inc.
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF SPUTTERING APPARATUS AND SPUTTERING METHOD
- Publication number 20170213706
- Publication date Jul 27, 2017
- Ulvac, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPORT APPARATUS AND VACUUM SYSTEM
- Publication number 20130343840
- Publication date Dec 26, 2013
- ULVAC, Inc.
- Yoshinori Fujii
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
FILM-FORMING DEVICE AND FILM-FORMING METHOD
- Publication number 20130092528
- Publication date Apr 18, 2013
- ULVAC, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPORT METHOD
- Publication number 20130004284
- Publication date Jan 3, 2013
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING APPARATUS OF ROBOT AND TEACHING METHOD OF ROBOT
- Publication number 20120116586
- Publication date May 10, 2012
- ULVAC, Inc.
- Yoshinori Fujii
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20120111833
- Publication date May 10, 2012
- Shinya Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHU...
- Publication number 20120103793
- Publication date May 3, 2012
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT HAND FOR SUBSTRATE TRANSFER
- Publication number 20120049555
- Publication date Mar 1, 2012
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING STOP OF TRANSPORT APPARATUS
- Publication number 20110229299
- Publication date Sep 22, 2011
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATION MONITORING SYSTEM FOR PROCESSING APPARATUS
- Publication number 20110125331
- Publication date May 26, 2011
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT HAND FOR SUBSTRATE TRANSFER
- Publication number 20110049921
- Publication date Mar 3, 2011
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER ROBOT AND VACUUM PROCESSING APPARATUS PROVIDED W...
- Publication number 20110014015
- Publication date Jan 20, 2011
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck device
- Publication number 20110013338
- Publication date Jan 20, 2011
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEHTOD OF MANUFACTURING ELECTROSTATIC CHUCK MECHANISM
- Publication number 20100287768
- Publication date Nov 18, 2010
- Yoshinori FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSIS SYSTEM FOR TRANSPORT ROBOT
- Publication number 20100256811
- Publication date Oct 7, 2010
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Position correcting apparatus, vacuum processing equipment and posi...
- Publication number 20100211210
- Publication date Aug 19, 2010
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Position correcting apparatus, vacuum processing equipment and posi...
- Publication number 20080175693
- Publication date Jul 24, 2008
- ULVAC, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Device
- Publication number 20070297118
- Publication date Dec 27, 2007
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Yoshinori Fujii

Person

Patents Grantslast 30 patents

Magnet unit for magnetron sputtering apparatus

Sputtering apparatus and method of forming film

Target assembly

Sputtering apparatus and method of discriminating state thereof

Target assembly

RF sputtering apparatus and sputtering method

Transport apparatus and vacuum system

Transport method

Substrate processing method

Operation monitoring system for processing apparatus

Teaching method for transfer robot

Method of controlling transfer robot

Robot hand for substrate transfer

Method of detecting stop of transport apparatus

Robot hand for substrate transfer

Position correcting apparatus, vacuum processing equipment and posi...

Electrostatic chuck device

Substrate temperature measurement apparatus and processing apparatus

Patents Applicationslast 30 patents

INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD

Magnet Unit for Magnetron Sputtering Apparatus

Sputtering Apparatus and Method of Forming Film

Sputtering Method and Sputtering Apparatus

DEPOSITION GUARD PLATE AND SPUTTERING DEVICE

FILM-FORMING METHOD AND SPUTTERING APPARATUS

Magnetron Sputtering Apparatus

Sputtering Apparatus and Method of Discriminating State Thereof

Target Assembly

TARGET ASSEMBLY

RF SPUTTERING APPARATUS AND SPUTTERING METHOD

TRANSPORT APPARATUS AND VACUUM SYSTEM

FILM-FORMING DEVICE AND FILM-FORMING METHOD

TRANSPORT METHOD

TEACHING APPARATUS OF ROBOT AND TEACHING METHOD OF ROBOT

SUBSTRATE PROCESSING METHOD

VACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHU...

ROBOT HAND FOR SUBSTRATE TRANSFER

METHOD OF DETECTING STOP OF TRANSPORT APPARATUS

OPERATION MONITORING SYSTEM FOR PROCESSING APPARATUS

ROBOT HAND FOR SUBSTRATE TRANSFER

SUBSTRATE TRANSFER ROBOT AND VACUUM PROCESSING APPARATUS PROVIDED W...

Electrostatic chuck device

MEHTOD OF MANUFACTURING ELECTROSTATIC CHUCK MECHANISM

DIAGNOSIS SYSTEM FOR TRANSPORT ROBOT

Position correcting apparatus, vacuum processing equipment and posi...

Position correcting apparatus, vacuum processing equipment and posi...

Electrostatic Chuck Device