Yoshinori HAGIO

Person

Mie, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern accuracy detecting apparatus and processing system
- Patent number 9,941,177
- Issue date Apr 10, 2018
- TOSHIBA MEMORY CORPORATION
- Kentaro Kasa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark formation method and semiconductor device
- Patent number 9,502,357
- Issue date Nov 22, 2016
- Kabushiki Kaisha Toshiba
- Yoshinori Hagio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring pattern misalignment
- Patent number 9,244,365
- Issue date Jan 26, 2016
- Kabushiki Kaisha Toshiba
- Yosuke Okamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV mask
- Patent number 9,146,458
- Issue date Sep 29, 2015
- Kabushiki Kaisha Toshiba
- Yoshinori Hagio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark, photomask, and method for forming alignment mark
- Patent number 9,136,224
- Issue date Sep 15, 2015
- Kabushiki Kaisha Toshiba
- Yoshinori Hagio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method, positional deviation measuring method and p...
- Patent number 8,859,167
- Issue date Oct 14, 2014
- Kabushiki Kaisha Toshiba
- Yoshinori Hagio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN ACCURACY DETECTING APPARATUS AND PROCESSING SYSTEM
- Publication number 20170271214
- Publication date Sep 21, 2017
- Kabushiki Kaisha Toshiba
- Kentaro KASA
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD...
- Publication number 20160379902
- Publication date Dec 29, 2016
- KABUSHIKI KAISHA TOSHIBA
- Yoshinori HAGIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT MARK FORMATION METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20160268211
- Publication date Sep 15, 2016
- KABUSHIKI KAISHA TOSHIBA
- Yoshinori HAGIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MARK, SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR WAFER
- Publication number 20160043037
- Publication date Feb 11, 2016
- KABUSHIKI KAISHA TOSHIBA
- Shinichi NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT MARK, PHOTOMASK, AND METHOD FOR FORMING ALIGNMENT MARK
- Publication number 20150008598
- Publication date Jan 8, 2015
- KABUSHIKI KAISHA TOSHIBA
- Yoshinori HAGIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING PATTERN MISALIGNMENT
- Publication number 20140285652
- Publication date Sep 25, 2014
- KABUSHIKI KAISHA TOSHIBA
- Yosuke OKAMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EUV EXPOSURE APPARATUS, EUV MASK, AND METHOD OF MEASURING DISTORTION
- Publication number 20140192335
- Publication date Jul 10, 2014
- Kabushiki Kaisha Toshiba
- Yoshinori HAGIO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD, POSITIONAL DEVIATION MEASURING METHOD AND P...
- Publication number 20140065522
- Publication date Mar 6, 2014
- Yoshinori HAGIO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoshinori HAGIO

Person

Patents Grantslast 30 patents

Pattern accuracy detecting apparatus and processing system

Alignment mark formation method and semiconductor device

Method for measuring pattern misalignment

EUV mask

Alignment mark, photomask, and method for forming alignment mark

Pattern forming method, positional deviation measuring method and p...

Patents Applicationslast 30 patents

PATTERN ACCURACY DETECTING APPARATUS AND PROCESSING SYSTEM

MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD...

ALIGNMENT MARK FORMATION METHOD AND SEMICONDUCTOR DEVICE

MARK, SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR WAFER

ALIGNMENT MARK, PHOTOMASK, AND METHOD FOR FORMING ALIGNMENT MARK

METHOD FOR MEASURING PATTERN MISALIGNMENT

EUV EXPOSURE APPARATUS, EUV MASK, AND METHOD OF MEASURING DISTORTION

PATTERN FORMING METHOD, POSITIONAL DEVIATION MEASURING METHOD AND P...