Yoshinori Ikeda

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,955,365
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,742,232
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Yoshinori Ikeda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing system and sub...
- Patent number 11,373,883
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Shota Umezaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having top plate with through hole a...
- Patent number 10,892,176
- Issue date Jan 12, 2021
- Tokyo Electron Limited
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,832,902
- Issue date Nov 10, 2020
- Tokyo Electron Limited
- Yoshinori Ikeda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and nozzle cleaning method
- Patent number 9,764,345
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Yoshihiro Kai
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,470,979
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus and cleaning method
- Patent number 9,387,520
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,304,398
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240178046
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230352328
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230311170
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Toru HIRATA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220037189
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210343576
- Publication date Nov 4, 2021
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313209
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUB...
- Publication number 20200006092
- Publication date Jan 2, 2020
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190355593
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20190341272
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170186601
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20160202609
- Publication date Jul 14, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD
- Publication number 20140352730
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yoshihiro Kai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20140071411
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20140026927
- Publication date Jan 30, 2014
- Nobuhiro Ogata
- B08 - CLEANING

Yoshinori Ikeda

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, substrate processing system and sub...

Substrate processing apparatus having top plate with through hole a...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and nozzle cleaning method

Developing treatment apparatus and developing treatment method

Liquid processing apparatus and cleaning method

Developing treatment apparatus and developing treatment method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUB...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

LIQUID PROCESSING APPARATUS AND CLEANING METHOD