Yoshinori Kagawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam drawing apparatus and charged particle beam d...
- Patent number 8,987,683
- Issue date Mar 24, 2015
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,847,178
- Issue date Sep 30, 2014
- Nuflare Technology, Inc.
- Michihiro Kawaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20140319373
- Publication date Oct 30, 2014
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20130082193
- Publication date Apr 4, 2013
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- B82 - NANO-TECHNOLOGY