Yoshinori Kato

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid treatment equipment, liquid treatment method, semiconductor...
- Patent number 6,848,457
- Issue date Feb 1, 2005
- Tokyo Electron Limited
- Yoshinori Marumo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, processing system and processing method
- Patent number 6,827,814
- Issue date Dec 7, 2004
- Tokyo Electron Limited
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for detecting an end point of a cleaning process
- Patent number 6,737,666
- Issue date May 18, 2004
- NEC Electronics Corporation
- Natsuko Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid treatment system and liquid treatment method
- Patent number 6,634,370
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Satoshi Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor-phase processing method capable of eliminating particle forma...
- Patent number 6,346,425
- Issue date Feb 12, 2002
- Tokyo Electron Limited
- Natsuko Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Liquid treatment equipment, liquid treatment method, semiconductor...
- Publication number 20010039118
- Publication date Nov 8, 2001
- Yoshinori Marumo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Liquid treatment equipment and liquid treatment method
- Publication number 20010037945
- Publication date Nov 8, 2001
- Wataru Okase
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Liquid treatment system and liquid treatment method
- Publication number 20010037764
- Publication date Nov 8, 2001
- Satoshi Nakashima
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Processing apparatus, processing system and processing method
- Publication number 20010037858
- Publication date Nov 8, 2001
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS