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Yoshinori KOKABU
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Kyoto-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate treating apparatus and substrate transporting method
Patent number
10,181,417
Issue date
Jan 15, 2019
SCREEN Semiconductor Solutions Co., Ltd.
Yoshinori Kokabu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
Publication number
20150279713
Publication date
Oct 1, 2015
SCREEN Semiconductor Solutions Co., Ltd.
Yoshinori KOKABU
H01 - BASIC ELECTRIC ELEMENTS