Yoshinori KUSAKABE

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thermal processing apparatus and cooling method
- Patent number 9,099,505
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Yoshinori Kusakabe
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING APPARATUS AND COOLING METHOD
- Publication number 20110076632
- Publication date Mar 31, 2011
- TOKYO ELECTRON LIMITED
- Yoshinori KUSAKABE
- C30 - CRYSTAL GROWTH