Yoshinori Makita

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 9,257,921
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning device, lithographic apparatus using same, and device m...
- Patent number 8,502,958
- Issue date Aug 6, 2013
- Canon Kabushiki Kaisha
- Yoshinori Makita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Temperature adjusting system in exposure apparatus
- Patent number 6,809,300
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position control method position control apparatus, and semiconduct...
- Patent number 5,696,590
- Issue date Dec 9, 1997
- Canon Kabushiki Kaisha
- Yoshinori Makita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for detecting a mark position
- Patent number 4,579,453
- Issue date Apr 1, 1986
- Canon Kabushiki Kaisha
- Yoshinori Makita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150357944
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
POSITIONING DEVICE, LITHOGRAPHIC APPARATUS USING SAME, AND DEVICE M...
- Publication number 20100309451
- Publication date Dec 9, 2010
- Canon Kabushiki Kaisha
- Yoshinori Makita
- G05 - CONTROLLING REGULATING
Information Patent Application
Immersion exposure apparatus, immersion exposure method, and device...
- Publication number 20060209280
- Publication date Sep 21, 2006
- Canon Kabushiki Kaisha
- Yoshinori Makita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Temperature adjusting system in exposure apparatus
- Publication number 20030111458
- Publication date Jun 19, 2003
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY