Yoshinori Marumo

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electroless plating pre-treatment solution and electroles plating m...
- Patent number 7,198,662
- Issue date Apr 3, 2007
- Tokyo Electron Limited
- Yoshinori Marumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solution processing apparatus and solution processing method
- Patent number 6,926,817
- Issue date Aug 9, 2005
- Tokyo Electron Limited
- Yoshinori Marumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid treatment equipment, liquid treatment method, semiconductor...
- Patent number 6,848,457
- Issue date Feb 1, 2005
- Tokyo Electron Limited
- Yoshinori Marumo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment system and solution treatment method
- Patent number 6,752,855
- Issue date Jun 22, 2004
- Tokyo Electron Limited
- Yoshinori Marumo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of forming a plated layer to a predetermined thickness
- Patent number 6,607,650
- Issue date Aug 19, 2003
- Tokyo Electron Ltd.
- Takayuki Niuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thickness measuring apparatus, substrate processing method, and sub...
- Patent number 6,331,890
- Issue date Dec 18, 2001
- Tokyo Electron Limited
- Yoshinori Marumo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Electroless plating apparatus and electroless plating method
- Publication number 20060037858
- Publication date Feb 23, 2006
- TOKYO ELECTRON LIMITED
- Yoshinori Marumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating method and apparatus, and computer storage medi...
- Publication number 20050196523
- Publication date Sep 8, 2005
- TOKYO ELECTRON LIMITED
- Yoshinori Marumo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electroless plating method and apparatus
- Publication number 20050164499
- Publication date Jul 28, 2005
- TOKYO ELECTRON LIMITED
- Yoshinori Marumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating pre-treatment solution and electroles plating m...
- Publication number 20050013928
- Publication date Jan 20, 2005
- TOKYO ELECTRON LIMITED
- Yoshinori Marumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating apparatus and electroless plating method
- Publication number 20040251141
- Publication date Dec 16, 2004
- TOKYO ELECTRON LIMITED
- Gishi Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quartz member for semiconductor manufacturing equipment and method...
- Publication number 20030000458
- Publication date Jan 2, 2003
- Yoshinori Marumo
- C30 - CRYSTAL GROWTH
Information Patent Application
Solution treatment system and solution treatment method
- Publication number 20030000893
- Publication date Jan 2, 2003
- Yoshinori Marumo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Solution processing apparatus and solution processing method
- Publication number 20020166575
- Publication date Nov 14, 2002
- Yoshinori Marumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Solution processing apparatus and solution processing method
- Publication number 20020127829
- Publication date Sep 12, 2002
- Yoshinori Marumo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid treatment equipment, liquid treatment method, semiconductor...
- Publication number 20010039118
- Publication date Nov 8, 2001
- Yoshinori Marumo
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Yoshinori Marumo

Person

Patents Grantslast 30 patents

Electroless plating pre-treatment solution and electroles plating m...

Solution processing apparatus and solution processing method

Liquid treatment equipment, liquid treatment method, semiconductor...

Solution treatment system and solution treatment method

Method of forming a plated layer to a predetermined thickness

Thickness measuring apparatus, substrate processing method, and sub...

Patents Applicationslast 30 patents

Electroless plating apparatus and electroless plating method

Electroless plating method and apparatus, and computer storage medi...

Electroless plating method and apparatus

Electroless plating pre-treatment solution and electroles plating m...

Electroless plating apparatus and electroless plating method

Quartz member for semiconductor manufacturing equipment and method...

Solution treatment system and solution treatment method

Solution processing apparatus and solution processing method

Solution processing apparatus and solution processing method

Liquid treatment equipment, liquid treatment method, semiconductor...