Yoshinori Matsui

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Joetsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Positive resist composition and patterning process
- Patent number 11,579,529
- Issue date Feb 14, 2023
- Shin-Etsu Chemical Co., Ltd.
- Yoshinori Matsui
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Epoxy compound, resist composition, and pattern forming process
- Patent number 11,492,337
- Issue date Nov 8, 2022
- Shin-Etsu Chemical Co., Ltd.
- Masayoshi Sagehashi
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
- Publication number 20200285152
- Publication date Sep 10, 2020
- Shin-Etsu Chemical Co., Ltd.
- Yoshinori Matsui
- C07 - ORGANIC CHEMISTRY
Information Patent Application
EPOXY COMPOUND, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
- Publication number 20200283400
- Publication date Sep 10, 2020
- Shin-Etsu Chemical Co., Ltd.
- Masayoshi Sagehashi
- C07 - ORGANIC CHEMISTRY