Yoshinori Miwa

Person

Tsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus
- Patent number 7,586,582
- Issue date Sep 8, 2009
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical system and exposure apparatus
- Patent number 7,435,984
- Issue date Oct 14, 2008
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G02 - OPTICS
Information Patent Grant
Cooling apparatus
- Patent number 7,265,812
- Issue date Sep 4, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus
- Patent number 7,145,632
- Issue date Dec 5, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus
- Patent number 7,095,480
- Issue date Aug 22, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 7,009,684
- Issue date Mar 7, 2006
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror holding mechanism in exposure apparatus, and device manufact...
- Patent number 6,982,841
- Issue date Jan 3, 2006
- Canon Kabushiki Kaisha
- Yoshiki Kino
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 6,829,038
- Issue date Dec 7, 2004
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,829,034
- Issue date Dec 7, 2004
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, and device manufacturing method
- Patent number 6,791,662
- Issue date Sep 14, 2004
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and manufacturing method using the same
- Patent number 6,762,822
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 6,590,631
- Issue date Jul 8, 2003
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,552,774
- Issue date Apr 22, 2003
- Canon Kabushiki Kaisha
- Tomoharu Hase
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure method and apparatus, and device manufacturing method
- Patent number 6,522,384
- Issue date Feb 18, 2003
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,493,066
- Issue date Dec 10, 2002
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method of producing a device usin...
- Patent number 6,278,516
- Issue date Aug 21, 2001
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,259,509
- Issue date Jul 10, 2001
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COOLING APPARATUS
- Publication number 20070091275
- Publication date Apr 26, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070035708
- Publication date Feb 15, 2007
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL SYSTEM AND EXPOSURE APPARATUS
- Publication number 20070007471
- Publication date Jan 11, 2007
- Koichi SENTOKU
- G02 - OPTICS
Information Patent Application
Mirror holding mechanism in exposure apparatus, and device manufact...
- Publication number 20060072219
- Publication date Apr 6, 2006
- Yoshiki Kino
- G02 - OPTICS
Information Patent Application
Cooling apparatus
- Publication number 20060017896
- Publication date Jan 26, 2006
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method
- Publication number 20050030505
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mirror holding mechanism in exposure apparatus, and device manufact...
- Publication number 20040218289
- Publication date Nov 4, 2004
- Yoshiki Kino
- G02 - OPTICS
Information Patent Application
Cooling apparatus
- Publication number 20040174504
- Publication date Sep 9, 2004
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and manufacturing method using the same
- Publication number 20030169408
- Publication date Sep 11, 2003
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus, and device manufacturing method
- Publication number 20030107717
- Publication date Jun 12, 2003
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME
- Publication number 20020145710
- Publication date Oct 10, 2002
- YOSHINORI MIWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20020140915
- Publication date Oct 3, 2002
- YOSHINORI MIWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method
- Publication number 20020071105
- Publication date Jun 13, 2002
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20010055326
- Publication date Dec 27, 2001
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20010030739
- Publication date Oct 18, 2001
- Tomoharu Hase
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Yoshinori Miwa

Person

Patents Grantslast 30 patents

Exposure apparatus

Imaging optical system and exposure apparatus

Cooling apparatus

Cooling apparatus

Cooling apparatus

Exposure apparatus and exposure method

Mirror holding mechanism in exposure apparatus, and device manufact...

Exposure apparatus and exposure method

Exposure apparatus and device manufacturing method

Exposure method and apparatus, and device manufacturing method

Exposure apparatus and manufacturing method using the same

Exposure apparatus and device manufacturing method using the same

Exposure apparatus

Exposure method and apparatus, and device manufacturing method

Exposure apparatus

Projection exposure apparatus and method of producing a device usin...

Exposure apparatus and device manufacturing method

Patents Applicationslast 30 patents

COOLING APPARATUS

EXPOSURE APPARATUS

IMAGING OPTICAL SYSTEM AND EXPOSURE APPARATUS

Mirror holding mechanism in exposure apparatus, and device manufact...

Cooling apparatus

Exposure apparatus and exposure method

Mirror holding mechanism in exposure apparatus, and device manufact...

Cooling apparatus

Exposure apparatus and manufacturing method using the same

Exposure method and apparatus, and device manufacturing method

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME

EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

Exposure apparatus and exposure method

Exposure apparatus and device manufacturing method

Exposure apparatus