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Yoshinori Mochizuki
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Hachioji, JP
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last 30 patents
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Patent Grant
Arm apparatus for conveying semiconductor wafer and processing syst...
Patent number
5,236,295
Issue date
Aug 17, 1993
Tokyo Electron Sagami Limited
Katsumi Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Horizontal/vertical conversion handling apparatus
Patent number
5,123,804
Issue date
Jun 23, 1992
Tokyo Electron Sagami Limited
Katsumi Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer transferring method and apparatus and boat for...
Patent number
5,030,057
Issue date
Jul 9, 1991
Tel Sagami Limited
Hironobu Nishi
H01 - BASIC ELECTRIC ELEMENTS