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Yoshinori Momonoi
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Kokubunji, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method for semiconductor devices
Patent number
6,977,229
Issue date
Dec 20, 2005
Renesas Technology Corp.
Kenetsu Yokogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
6,713,401
Issue date
Mar 30, 2004
Hitachi, Ltd.
Kenetsu Yokogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for cleaning semiconductor wafers in a vacuum environment
Patent number
6,643,893
Issue date
Nov 11, 2003
Hitachi, Ltd.
Yoshinori Momonoi
B08 - CLEANING
Information
Patent Grant
Method for cleaning semiconductor wafers in a vacuum environment
Patent number
6,629,538
Issue date
Oct 7, 2003
Hitachi, Ltd.
Kenetsu Yokogawa
B08 - CLEANING
Information
Patent Grant
Plasma processing system and method for manufacturing a semiconduct...
Patent number
6,551,445
Issue date
Apr 22, 2003
Hitachi, Ltd.
Ken'etsu Yokogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment apparatus and plasma treatment method
Patent number
6,475,918
Issue date
Nov 5, 2002
Hitachi, Ltd.
Masaru Izawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Manufacturing method for semiconductor devices
Publication number
20040018727
Publication date
Jan 29, 2004
Hitachi, Ltd.
Kenetsu Yokogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry cleaning method
Publication number
20020092541
Publication date
Jul 18, 2002
Kenetsu Yokogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry cleaning apparatus
Publication number
20020092121
Publication date
Jul 18, 2002
Yoshinori Momonoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20020094691
Publication date
Jul 18, 2002
Hitachi, Ltd.
Kenetsu Yokogawa
H01 - BASIC ELECTRIC ELEMENTS