Yoshinori NAKAGAWA

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Numazu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chamber of charged particle beam drawing apparatus
- Patent number D759603
- Issue date Jun 21, 2016
- NuFlare Technology, Inc.
- Hiroyasu Saito
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Charged particle beam drawing apparatus and drawing chamber
- Patent number 9,196,458
- Issue date Nov 24, 2015
- NuFlare Technology, Inc.
- Hiroyasu Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and drawing chamber
- Patent number 9,165,747
- Issue date Oct 20, 2015
- NuFlare Technology, Inc.
- Hiroyasu Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber of charged particle beam drawing apparatus
- Patent number D722298
- Issue date Feb 10, 2015
- NuFlare Technology, Inc.
- Hiroyasu Saito
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING CHAMBER
- Publication number 20150021495
- Publication date Jan 22, 2015
- NuFlare Technology, Inc.
- Hiroyasu SAITO
- H01 - BASIC ELECTRIC ELEMENTS