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Yoshinori Obise
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Chigasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Ion beam irradiation device
Patent number
9,595,418
Issue date
Mar 14, 2017
ULVAC, Inc.
Yoshiaki Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ION BEAM IRRADIATION DEVICE
Publication number
20150179395
Publication date
Jun 25, 2015
Ulvac, Inc.
Yoshiaki Yamamoto
H01 - BASIC ELECTRIC ELEMENTS