Yoshinori Ohsaki

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Calibration method, measurement apparatus, exposure apparatus, and...
- Patent number 10,401,744
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, and article manufacturing method
- Patent number 9,639,008
- Issue date May 2, 2017
- Canon Kabushiki Kaisha
- Yuichiro Morikuni
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavefront aberration measurement apparatus, exposure apparatus, and...
- Patent number 8,400,612
- Issue date Mar 19, 2013
- Canon Kabushiki Kaisha
- Kazuki Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,294,875
- Issue date Oct 23, 2012
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,130,360
- Issue date Mar 6, 2012
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus equipped with interferometer and exposure appara...
- Patent number 8,013,980
- Issue date Sep 6, 2011
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus, optical member, and device manufactu...
- Patent number 7,787,103
- Issue date Aug 31, 2010
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,602,504
- Issue date Oct 13, 2009
- Canon Kabushiki Kaisha
- Miwako Ando
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having interferometer and device manufacturing m...
- Patent number 7,417,712
- Issue date Aug 26, 2008
- Canon Kabushiki Kaisha
- Miwaki Ando
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,403,263
- Issue date Jul 22, 2008
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus equipped with interferometer and method of using...
- Patent number 7,330,237
- Issue date Feb 12, 2008
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,221,431
- Issue date May 22, 2007
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 7,218,379
- Issue date May 15, 2007
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 7,154,582
- Issue date Dec 26, 2006
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 7,148,956
- Issue date Dec 12, 2006
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,050,150
- Issue date May 23, 2006
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 7,046,333
- Issue date May 16, 2006
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 6,989,885
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus, and device manufacturing method usin...
- Patent number 6,833,906
- Issue date Dec 21, 2004
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method, exposure apparatus using this aligning method, and...
- Patent number 6,649,484
- Issue date Nov 18, 2003
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, imaging performance measurement method, device...
- Patent number 6,646,714
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,278,514
- Issue date Aug 21, 2001
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for measuring optical characteristics
- Patent number 6,215,549
- Issue date Apr 10, 2001
- Canon Kabushiki Kaisha
- Takashi Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring optical anisotropy
- Patent number 6,088,115
- Issue date Jul 11, 2000
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G01 - MEASURING TESTING
Information Patent Grant
Surface position detecting system and device manufacturing method u...
- Patent number 6,040,909
- Issue date Mar 21, 2000
- Canon Kabushiki Kaisha
- Masanobu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for measuring optical anisotropy
- Patent number 5,903,352
- Issue date May 11, 1999
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring optical anisotropy
- Patent number 5,838,453
- Issue date Nov 17, 1998
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150042969
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Yuichiro MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
- Publication number 20150015861
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
WAVEFRONT ABERRATION MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
- Publication number 20100309448
- Publication date Dec 9, 2010
- Canon Kabushiki Kaisha
- Kazuki Yamamoto
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090015815
- Publication date Jan 15, 2009
- Canon Kabushiki Kaisha
- Yoshinori OHSAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080259349
- Publication date Oct 23, 2008
- Canon Kabushiki Kaisha
- Miwako Ando
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS EQUIPPED WITH INTERFEROMETER AND EXPOSURE APPARA...
- Publication number 20080111980
- Publication date May 15, 2008
- Canon Kabushiki Kaisha
- Yoshinori OHSAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS, OPTICAL MEMBER, AND DEVICE MANUFACTU...
- Publication number 20080094597
- Publication date Apr 24, 2008
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080036990
- Publication date Feb 14, 2008
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070188728
- Publication date Aug 16, 2007
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method
- Publication number 20060203219
- Publication date Sep 14, 2006
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus having interferometer and device manufacturing m...
- Publication number 20060119821
- Publication date Jun 8, 2006
- Miwako Ando
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus equipped with interferometer and exposure appara...
- Publication number 20060044536
- Publication date Mar 2, 2006
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and method
- Publication number 20050219487
- Publication date Oct 6, 2005
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050146693
- Publication date Jul 7, 2005
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, alignment method and device manufacturing method
- Publication number 20050128455
- Publication date Jun 16, 2005
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20040189963
- Publication date Sep 30, 2004
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20040179176
- Publication date Sep 16, 2004
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method
- Publication number 20040179177
- Publication date Sep 16, 2004
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and method
- Publication number 20040119960
- Publication date Jun 24, 2004
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, imaging performance measurement method, device...
- Publication number 20020033935
- Publication date Mar 21, 2002
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Aligning method, exposure apparatus using this aligning method, and...
- Publication number 20010041417
- Publication date Nov 15, 2001
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoshinori Ohsaki

Person

Patents Grantslast 30 patents

Calibration method, measurement apparatus, exposure apparatus, and...

Lithography apparatus, and article manufacturing method

Wavefront aberration measurement apparatus, exposure apparatus, and...

Exposure apparatus and device fabrication method

Exposure apparatus and device manufacturing method

Exposure apparatus equipped with interferometer and exposure appara...

Projection exposure apparatus, optical member, and device manufactu...

Exposure apparatus and device manufacturing method

Exposure apparatus having interferometer and device manufacturing m...

Exposure apparatus

Exposure apparatus equipped with interferometer and method of using...

Exposure apparatus

Scanning exposure apparatus and method

Exposure apparatus and method

Exposure method

Exposure apparatus

Exposure method

Scanning exposure apparatus and method

Projection exposure apparatus, and device manufacturing method usin...

Aligning method, exposure apparatus using this aligning method, and...

Exposure apparatus, imaging performance measurement method, device...

Exposure apparatus

Apparatus for measuring optical characteristics

Apparatus and method for measuring optical anisotropy

Surface position detecting system and device manufacturing method u...

Apparatus and method for measuring optical anisotropy

Apparatus and method for measuring optical anisotropy

Patents Applicationslast 30 patents

LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...

WAVEFRONT ABERRATION MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS EQUIPPED WITH INTERFEROMETER AND EXPOSURE APPARA...

PROJECTION EXPOSURE APPARATUS, OPTICAL MEMBER, AND DEVICE MANUFACTU...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS

Exposure method

Exposure apparatus having interferometer and device manufacturing m...

Exposure apparatus equipped with interferometer and exposure appara...

Scanning exposure apparatus and method

Exposure apparatus

Exposure apparatus, alignment method and device manufacturing method

Exposure apparatus and method

Exposure apparatus

Exposure method

Scanning exposure apparatus and method

Exposure apparatus, imaging performance measurement method, device...

Aligning method, exposure apparatus using this aligning method, and...