Yoshinori Osaki

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Control method and plasma processing apparatus
- Patent number 11,658,012
- Issue date May 23, 2023
- Tokyo Electron Limited
- Toshiyuki Arakane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharging method and substrate processing apparatus
- Patent number 11,462,431
- Issue date Oct 4, 2022
- Tokyo Electron Limited
- Toshiyuki Arakane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measuring device, measurement method, and plasma processing device
- Patent number 10,720,313
- Issue date Jul 21, 2020
- Tokyo Electron Limited
- Masanori Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulating film forming method and substrate processing method
- Patent number 7,915,179
- Issue date Mar 29, 2011
- Tokyo Electron Limited
- Yoshihiro Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210183625
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Toshiyuki ARAKANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200343124
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Toshiyuki ARAKANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASURING DEVICE, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
- Publication number 20190066982
- Publication date Feb 28, 2019
- TOKYO ELECTRON LIMITED
- Masanori SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-NITRIDING METHOD
- Publication number 20120251737
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Yoshinori OSAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING GERMANIUM OXIDE FILM AND MATERIAL FOR ELECTRONIC...
- Publication number 20120248583
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Yoshiro KABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Insulating Film Forming Method and Substrate Processing Method
- Publication number 20080000551
- Publication date Jan 3, 2008
- Tokyo Electron Limited
- Yoshihiro Sato
- H01 - BASIC ELECTRIC ELEMENTS