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Yoshinori Suenaga
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Hiratsuka-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor wafer inspection device and method
Patent number
7,576,852
Issue date
Aug 18, 2009
Sumco Tech XIV Corporation
Fumi Nabeshima
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Semiconductor wafer inspection device and method
Publication number
20090040512
Publication date
Feb 12, 2009
KOMATSU ELECTRONIC METALS CO., LTD.
Fumi Nabeshima
G01 - MEASURING TESTING