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Yoshinori TAWARATANI
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Kyoto-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,144,033
Issue date
Dec 4, 2018
SCREEN Holdings Co., Ltd.
Masanori Imamura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20170056917
Publication date
Mar 2, 2017
SCREEN Holdings Co., Ltd.
Masanori IMAMURA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...