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Manufacturing method of oxide semiconductor
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Patent number 10,388,520
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Issue date Aug 20, 2019
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for manufacturing sputtering target
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Patent number 10,316,404
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Issue date Jun 11, 2019
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device
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Patent number 9,806,201
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Issue date Oct 31, 2017
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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H01 - BASIC ELECTRIC ELEMENTS